Title :
P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers
Author :
Olcum, Selim ; Atalar, Abdullah ; Köymen, Hayrettin ; Oguz, Kagan ; Senlik, Muhammed N.
Author_Institution :
Bilkent Univ., Ankara
Abstract :
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micro- machining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Keywords :
capacitors; micromachining; microsensors; piezoelectric transducers; ultrasonic transducers; CMUT absolute receive sensitivity spectra; CMUT absolute transmit sensitivity spectra; CMUT experimental characterization; CMUT fabrication; capacitive micromachined ultrasonic transducers; pulse echo experiments; sacrificial surface micromachining process; Biomembranes; Electrodes; Fabrication; Gold; Micromachining; Piezoelectric transducers; Silicon; Sonar equipment; Testing; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.536
