P4M-8 Interaction Between a cMUT Cell and a Liquid Medium around the Parallel Resonance Frequency

Author

Senlik, Muhammed N. ; Atalar, Abdullah ; Olcum, Selim

Author_Institution

Bilkent Univ., Ankara

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

2151

Lastpage

2154

Abstract

In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency.

Keywords

acoustic parametric devices; acoustic resonance; capacitive sensors; liquids; membranes; micromachining; ultrasonic transducers; cMUT membrane velocity; capacitive micromachined ultrasonic transducer; immersion medium interactions; liquid medium; parallel resonance frequency; parametric model; residual term; velocity term; Biomembranes; Capacitance; Coupling circuits; Equivalent circuits; Impedance; Parametric statistics; Resonance; Resonant frequency; Silicon; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.541

Filename

4410114