Title :
Vibration control of a turbomolecular vacuum pump using piezoelectric actuators
Author :
Piroddi, Luigi ; Leva, Alberto ; Casaro, Fausto
Author_Institution :
Dipt. di Elettronica e Informazione, Politecnico di Milano, Milan
Abstract :
This manuscript presents an experimental activity concerning the active vibration control of a turbomolecular vacuum pump. Based on extensive tests, performed with the ad hoc laboratory setup described in this work, some possible alternatives are devised for the design of a digital active control system. Both simulations and (preliminary) experimental results are reported
Keywords :
control system synthesis; digital control; piezoelectric actuators; vacuum pumps; vibration control; active vibration control; digital active control system design; piezoelectric actuators; turbomolecular vacuum pump; Control systems; Damping; Frequency; Instruments; Laboratories; Piezoelectric actuators; Robust stability; Sampling methods; Vacuum systems; Vibration control;
Conference_Titel :
Decision and Control, 2006 45th IEEE Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-0171-2
DOI :
10.1109/CDC.2006.377707
