Comparison of different methods to cancel offset capacitance in capacitive displacement sensors

This paper presents a comparative study of the power consumption of two methods to cancel the offset capacitance in high-resolution capacitive displacement sensors. One method is applied based on correlated-double-sampling (CDS) technique and the other method is applied using oversampling technique. The analytical comparison predicts similar power consumption, if the same resolution for the same conversion time need to be reached. Experimental results with implementations of the two methods confirmed the analytical prediction.