Water in plasma polymerized organosilicon film-structure and electrical properties

Author

Kryszewski, M. ; Tyczkowski, J. ; Kazimierski, P.

Author_Institution

Centre of Molecular & Macromolecular Studies, Polish Acad. of Sci., Lodz, Poland

fYear

1988

fDate

5-8 June 1988

Firstpage

168

Lastpage

171

Abstract

The influence of water absorption on properties of plasma-polymerized organosilicon films, particularly their dielectric behavior and electrical conductivity, is described. It has been found that these materials undergo slight swelling following absorption of water molecules. The presence of water molecules in the form of aggregates strongly bonded to the film structure is responsible for the appearance of phase transition effects at 270 K.<>

Keywords

dielectric thin films; electronic conduction in insulating thin films; organic compounds; permittivity; plasma deposited coatings; solid-state phase transformations; sorption; swelling; H/sub 2/O; aggregates; dielectric behavior; dielectric constant; electrical conductivity; electrical properties; phase transition effects; plasma polymerized organosilicon film; swelling; water absorption; Absorption; Conducting materials; Conductive films; Conductivity; Dielectric films; Dielectric materials; Plasma materials processing; Plasma properties; Polymer films; Water;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Insulation, 1988., Conference Record of the 1988 IEEE International Symposium on

Conference_Location

Cambridge, MA, USA

ISSN

1089-084X

Type

conf

DOI

10.1109/ELINSL.1988.13896

Filename

13896