Title :
Biocompatible nanolayered polymerization of MEMS devices
Author :
Vidyala, Sri Divya ; Asghar, Waseem ; Iqbal, Samir M.
Author_Institution :
Bioeng. Dept., Univ. of Texas at Arlington, Arlington, TX, USA
fDate :
Aug. 30 2011-Sept. 3 2011
Abstract :
Deposition of polymeric and biocompatible nanolayers on the solid-state substrates is done using a simple vacuum chamber. The chemical characteristics of the deposited nanolayer are analyzed using Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The surface morphology of the nanolayers is analyzed using contact angle goniometer and scanning electron microscopy. The coated nanolayers show excellent stability in different chemical surroundings including the physiological pH therefore making it applicable in coating 3D MEMS devices and body implants which need medicated coating. A micropore is coated with this approach and results depict uniform coating of the structure.
Keywords :
Fourier transform spectra; X-ray photoelectron spectra; coatings; contact angle; infrared spectra; micromechanical devices; nanostructured materials; polymerisation; polymers; scanning electron microscopy; surface morphology; 3D MEMS devices; Fourier transform infrared spectroscopy; X-ray photoelectron spectroscopy; biocompatible nanolayered polymerization; body implants; chemical properties; contact angle goniometer; nanolayered organic polymer coating; physiological pH; scanning electron microscopy; surface morphology; Chemicals; Coatings; Films; Nanobioscience; Surface impedance; Surface morphology; Surface treatment; Biocompatible Materials; Hydrogen-Ion Concentration; Micro-Electrical-Mechanical Systems; Microscopy, Electron, Scanning; Photoelectron Spectroscopy; Spectroscopy, Fourier Transform Infrared;
Conference_Titel :
Engineering in Medicine and Biology Society, EMBC, 2011 Annual International Conference of the IEEE
Conference_Location :
Boston, MA
Print_ISBN :
978-1-4244-4121-1
Electronic_ISBN :
1557-170X
DOI :
10.1109/IEMBS.2011.6090799
