Title :
A comtarison study of the logic of four wafer fabrication simulators
Author :
Mason, Scott J. ; Jensen, Paul A. ; Fowler, John W.
Author_Institution :
Arizona State University
Keywords :
Analytical models; Fabrication; Logic; Manufacturing industries; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device packaging; Textile industry; Virtual manufacturing;
Conference_Titel :
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN :
0-7803-3383-7
DOI :
10.1109/WSC.1996.873400
