DocumentCode :
2482321
Title :
Application of a 2-stage group-screening design to a whole-line semiconductor manufacturing simulation model
Author :
Ivanova, Theodora ; Mollaghasemi, Mansooreh ; Malone, Linda
Author_Institution :
Lucent Technologies
fYear :
1996
fDate :
1996
Firstpage :
1039
Lastpage :
1045
Keywords :
Analytical models; Circuit simulation; Design engineering; Design for experiments; Manufacturing industries; Pulp manufacturing; Regression analysis; Semiconductor device manufacture; Technology management; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN :
0-7803-3383-7
Type :
conf
DOI :
10.1109/WSC.1996.873401
Filename :
873401
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2482321
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