Modeling and analysis of an enhanced compliant parallel mechanism for high accuracy micro motion

There is an increasing requirement, in a variety of fields, for the ability to make microscopic movements or to position items with high degree of accuracy. In this paper, a parallel mechanism with prismatic actuators which encompasses three degrees of freedom and can produce motion on a microscopic level is proposed and developed. In order to produce such motion, the mechanism is composed of compliant joints and links and flexure hinges, so it may also be referred to as a compliant mechanism. First, the detailed design of motion systems for the machine structure is introduced, followed by the mathematical analysis based on kinematics model of the presented mechanism. Finally, a comprehensive Finite Element Method analysis is carried out for the device optimization.