P6E-3 Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface

Author

Fujii, Yosuke ; Kotani, Hiroyuki ; Masaya, T. ; Mizuno, Takeshi ; Aoki, Yuichi ; Adachi, Yusuke ; Ohtake, Naoto

Author_Institution

Saitama Univ., Saitama

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

2543

Lastpage

2546

Abstract

A surface acoustic wave (SAW) linear motor, which is a kind of ultrasonic motors, has many merits such as thin structure, large force, high speed, precise positioning and so on. On the other hand, wear is one of problems in the motor due to friction drive principle. Diamond-like carbon (DLC) films have been recognized as a wear resistant material. In this research, segment structured DLC films are focused to avoid the DLC property of easy damage. Installation of the films to friction surface of the motor is reported. Measurement result of its driving characteristics is also described.

Keywords

diamond-like carbon; friction; linear motors; surface acoustic wave devices; ultrasonic motors; wear resistant coatings; C; SAW linear motor; contact surface; driving characteristics; friction drive principle; segment-structured diamond-like carbon films; surface acoustic wave linear motor; ultrasonic motor; wear resistant material; AC motors; Acoustic waves; Diamond-like carbon; Friction; Organic materials; Plasma sources; Silicon; Stators; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.640

Filename

4410213