Title :
P6H-8 Design of a Bulk-Micromachined Piezoelectric Accelerometer
Author :
Yang, Hui ; Guo, Hang
Author_Institution :
Xiamen Univ., Xiamen
Abstract :
A bulk-micromachined piezoelectric accelerometer is proposed and designed, in which the bulk-micromachined silicon seismic mass is suspended by the cantilevers and part of cantilever is covered with ZnO piezoelectric thin film. In this paper, we first derive the one-dimensional analytical model of the piezoelectric cantilever to study the factors affecting the sensitivity of the accelerometer, and then design the piezoelectric accelerometers with straight and folded cantilever structures. Totally, 12 different structures of the microaccelerometer are investigated. The results show that this type of bulk- micromachined piezoelectric accelerometer can own high sensitivity and wide working range to meet requirement of some applications in aerospace and mechanical shock inspection for vehicles.
Keywords :
II-VI semiconductors; accelerometers; cantilevers; microsensors; piezoelectric devices; piezoelectric thin films; silicon; ultrasonic devices; wide band gap semiconductors; zinc compounds; Si; ZnO; ZnO piezoelectric thin film; accelerometer sensitivity; bulk micromachined piezoelectric accelerometer; microaccelemeter; piezoelectric cantilever 1D analytical model; silicon seismic mass; Accelerometers; Analytical models; Electric shock; Inspection; Micromechanical devices; Piezoelectric films; Silicon; Space technology; Stress; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1383-6
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.654
