Title :
LT GaAs semi-insulating layers applied in vertical-cavity surface-emitting lasers
Author :
Reginski, K. ; Malag, A. ; Radomska, D. ; Bugajski, M.
Author_Institution :
Inst. of Electron Technol., Warsaw, Poland
fDate :
29 Apr-3 May 1996
Abstract :
In this paper we report on the optimization of the MBE growth process for obtaining semi-insulating LT-GaAs layers applied in vertical-cavity surface-emitting-lasers. The technological conditions for growing LT-GaAs layers have been found and test processes for growing the laser structure at the optimum conditions have been performed. Although numerous optoelectronic applications of LT GaAs have been demonstrated we believe that this is one of the rare cases when LT GaAs has been used in semiconductor laser technology
Keywords :
III-V semiconductors; gallium arsenide; molecular beam epitaxial growth; semiconductor epitaxial layers; semiconductor growth; semiconductor lasers; surface emitting lasers; GaAs; MBE growth; current blocking layers; semi-insulating layers; semiconductor laser; vertical-cavity surface-emitting lasers; Annealing; Conductivity; Gallium arsenide; Molecular beam epitaxial growth; Semiconductor lasers; Surface emitting lasers; Surface reconstruction; Temperature; Testing; Vertical cavity surface emitting lasers;
Conference_Titel :
Semiconducting and Semi-Insulating Materials Conference, 1996. IEEE
Conference_Location :
Toulouse
Print_ISBN :
0-7803-3179-6
DOI :
10.1109/SIM.1996.571113