DocumentCode
2483775
Title
Integrated optical sensor for the detection of photoresist failures
Author
Mirian, Farhad ; Diaz, Marcos Martinez ; Bitzer, Thomas
Author_Institution
Metrol., Infineon Technol., Villach, Austria
fYear
2012
fDate
13-16 May 2012
Firstpage
1375
Lastpage
1377
Abstract
In semiconductor manufacturing, the early detection of defects is one of the key factors to increase the yield. In this paper, we present an optical sensor for the detection of photo resist failures which has been integrated into the spin coating process equipment. The detection method is based on the measurement of light which is scattered at imperfections of the photo resist layer. In the case of the detection of a photoresist failure, the sensor sets an alarm which is sent to the advanced process control (APC) system.
Keywords
flaw detection; optical sensors; photoresists; spin coating; advanced process control; defect detection; integrated optical sensor; photo resist failure; photo resist layer; photoresist failure detection; semiconductor manufacturing; spin coating process equipment; Coatings; Detectors; Laser beams; Optical sensors; Optical surface waves; Resists; Surface treatment; defect detection; integreted sensor; optical sensor; photoresist; spin coating;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location
Graz
ISSN
1091-5281
Print_ISBN
978-1-4577-1773-4
Type
conf
DOI
10.1109/I2MTC.2012.6229572
Filename
6229572
Link To Document