Title :
Investigation of charge carrier dynamics in silicon wafers using terahertz imaging spectroscopy
Author :
Arnold, Thomas ; De Biasio, Martin ; Mühleisen, Wolfgang ; Leitner, Raimund
Author_Institution :
CTR Carinthian Tech Res. AG, Villach, Austria
Abstract :
Terahertz time-domain spectroscopy can be used to characterize silicon solar cell properties such as: conductivity, charge carrier mobility and density. Moreover, THz spectroscopy and imaging can be used for defect analysis in semiconductor and photovoltaic materials. This paper describes the investigation of optically injected charge carrier dynamics by the use of THz spectroscopy. THz-pump/THz-probe measurements were carried out at different measurement positions on silicon wafers which were illuminated by a metal-halid light source. Results indicate that THz time-domain spectroscopy is a promising technique for the characterization of silicon wafers for photovoltaic industry.
Keywords :
carrier mobility; elemental semiconductors; silicon; solar cells; terahertz spectroscopy; terahertz wave imaging; Si; optically injected charge carrier dynamics; photovoltaic material; silicon wafer; terahertz imaging spectroscopy; terahertz time domain spectroscopy; Delay; Light sources; Measurement by laser beam; Semiconductor device measurement; Silicon; Spectroscopy;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location :
Graz
Print_ISBN :
978-1-4577-1773-4
DOI :
10.1109/I2MTC.2012.6229574