Title :
New measurement information system of biosensor in relativity humidity
Author :
Yang, Chih Chin ; Wu, Ping Chen
Author_Institution :
Dept. of Microelectron. Eng., Nat. Kaohsiung Marine Univ., Kaohsiung, Taiwan
fDate :
Nov. 30 2010-Dec. 2 2010
Abstract :
In this research, the ZnO biosensor is successfully grown on the (100) silicon substrate. The lithography technology is sued to fabricate the biosensor. The test system of humidity sensor is constructed in our laboratory with measurement information system. The test information system can precisely examine the relativity humidity message of environment. The impedance information of ZnO biosensor is linearly increased in variety as increasing of the relativity humidity in examined environment with measurement calculating.
Keywords :
biosensors; computerised instrumentation; humidity measurement; lithography; ZnO; biosensor measurement information system; humidity sensor; impedance information; lithography technology; relativity humidity; silicon substrate; test information system; Biosensors; Humidity; Humidity measurement; Semiconductor device measurement; Substrates; Temperature measurement; Zinc oxide;
Conference_Titel :
Computer Sciences and Convergence Information Technology (ICCIT), 2010 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-8567-3
Electronic_ISBN :
978-89-88678-30-5
DOI :
10.1109/ICCIT.2010.5711188
