Capabilities of low power excimer lasers in micromachining

Small excimer lasers in combination with high-resolution imaging and precision motion control systems are capable of direct-write shaping of many polymers, ceramics, glasses, and metal films. Microfabrication workstations of this type are often characterized by size, cost, and facilities requirements compatible with the resources of most laboratories and speciality shops involved in development or small-batch manufacturing of microstructures. Use of deep-up laser wavelengths allows application of ablation processes to a broad range of materials, and the maskless, direct-write fabrication method is well-suited to rapid set-up and change-over. In addition, the direct-write scheme can be employed to fabricate truly three dimensional microstructures with continuous variation of surface height and good surface finish