DocumentCode :
2488513
Title :
Modern Technologies
Author :
Ura, F.
fYear :
1972
fDate :
1972
Firstpage :
78
Lastpage :
78
Keywords :
Bonding; Chemical technology; Chemical vapor deposition; Electron beams; Electronics industry; Epitaxial growth; Ion beams; Ion implantation; Laboratories; Semiconductor materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
26th Annual Symposium on Frequency Control. 1972
Type :
conf
DOI :
10.1109/FREQ.1972.199891
Filename :
1536831
Link To Document :
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