Title :
Micro systems technology
Author :
Fluitman, Jan H J
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines. Apart from the traditional and ever developing line of “classical” precision engineering, there is a line along micro electronics, micro sensors and actuators. This is the line we focus on in this contribution. The third line worth mentioning is the one along the upcoming field of molecular engineering. The main purpose of this paper is to show the wealth of possibilities and consequently the need for “integral design” management
Keywords :
micromachining; micromechanical devices; semiconductor technology; integral design; micro systems technology; microactuators; microelectronics; microsensors; molecular engineering; precision engineering; Actuators; Anisotropic magnetoresistance; Continuous production; Displays; Etching; Micromachining; Precision engineering; Sensor systems; Silicon; Wafer bonding;
Conference_Titel :
Custom Integrated Circuits Conference, 1994., Proceedings of the IEEE 1994
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-1886-2
DOI :
10.1109/CICC.1994.379679