Title :
Rapid photolithographic fabrication of three dimensional microfluidic devices
Author :
Quirk, D.J. ; Beebe, D.J.
Author_Institution :
Dept. of Biomed. Eng., Wisconsin Univ., WI, USA
Abstract :
A method for fabrication of three dimensional microfluidic devices is presented. The polymer devices are defined using two or more masks through which the devices are exposed to a radiative cure at different angles. Unlike most descriptions of fabrication of 3D devices, this design does not require the stacking of multiple 2D layers. The use of 3D CAD software to aid in producing the masks is presented.
Keywords :
biomedical equipment; masks; microfluidics; photolithography; polymerisation; 3D CAD software; in situ polymerization; multiple 2D layers stacking; porous filters; radiative cure; rapid inexpensive manufacture; rapid photolithographic fabrication; residual stresses can; responsive hydrogels; three dimensional microfluidic devices; Biomedical engineering; Chemistry; Curing; Design automation; Fabrication; Microfluidics; Polymers; Residual stresses; Stacking; Temperature;
Conference_Titel :
Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference, 2002. Proceedings of the Second Joint
Print_ISBN :
0-7803-7612-9
DOI :
10.1109/IEMBS.2002.1053043
