• DocumentCode
    2489514
  • Title

    Clean Surface Technology

  • Author

    White, Malcolm L.

  • fYear
    1973
  • fDate
    1973
  • Firstpage
    79
  • Lastpage
    88
  • Keywords
    Boron; Glass; Goniometers; Instruments; Pollution measurement; Silicon; Surface cleaning; Surface contamination; Surface morphology; Water pollution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    27th Annual Symposium on Frequency Control. 1973
  • Type

    conf

  • DOI
    10.1109/FREQ.1973.199945
  • Filename
    1536885