DocumentCode
2489519
Title
Thin Film Metallization of Oxides in Microelectronics
Author
Mattox, D.M.
fYear
1973
fDate
1973
Firstpage
89
Lastpage
97
Keywords
Atomic layer deposition; Heating; Inorganic materials; Metallization; Microelectronics; Sputtering; Substrates; Surface cleaning; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
27th Annual Symposium on Frequency Control. 1973
Type
conf
DOI
10.1109/FREQ.1973.199946
Filename
1536886
Link To Document