DocumentCode :
2489519
Title :
Thin Film Metallization of Oxides in Microelectronics
Author :
Mattox, D.M.
fYear :
1973
fDate :
1973
Firstpage :
89
Lastpage :
97
Keywords :
Atomic layer deposition; Heating; Inorganic materials; Metallization; Microelectronics; Sputtering; Substrates; Surface cleaning; Temperature; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
27th Annual Symposium on Frequency Control. 1973
Type :
conf
DOI :
10.1109/FREQ.1973.199946
Filename :
1536886
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2489519
