The Influence of Coulomb Interaction on Spatial Resolution of Charged Particles Nanobeams in Modern Projetion and Scanning Systems

Author

Nedoreshta, V.N. ; Roshchupkin, S.P. ; Lusenko, O.B.

Author_Institution

Inst. of Appl. Phys., Nat. Acad. of Sci. of Ukraine, Sumy

fYear

0

fDate

0-0 0

Firstpage

466

Lastpage

468

Abstract

The influence of space charge effect and effects of stochastic Coulomb interaction on spatial resolution of charged particles beams is theoretically studied. The beams of nonrelativistic protons and electrons with a radius about 1 nm were investigated. The cases of different energies in the range of currents from pA to muA typical for modern facilities were examined. Beam broadening due to influence of a space charge with the set distribution and also due to influence of stochastic effects of pair Coulomb interactions was studied. The regions of particles energies and beam currents under which effects of space charge and stochastic interaction of the charged particles have significant influence on spatial resolution are selected

Keywords

electrons; particle beam focusing; particle beams; protons; space charge; Coulomb interaction; beam currents; charged particles nanobeams; nonrelativistic electrons; nonrelativistic protons; projection systems; scanning systems; space charge effect; Electron beams; Equations; Europe; Particle beams; Physics; Protons; Space charge; Spatial resolution; Stochastic processes; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Mathematical Methods in Electromagnetic Theory, 2006 International Conference on

Conference_Location

Kharkiv

Print_ISBN

1-4244-0490-8

Type

conf

DOI

10.1109/MMET.2006.1689824

Filename

1689824