Title :
Integration of Vertically Aligned Carbon Nano Fibers with CMOS Integrated Circuits for Sensor Applications
Author :
Rahman, Touhidur ; Mcknight, Timothy E. ; Fletcher, Benjamin L. ; Melechko, Anatoli V. ; Simpson, Michael L. ; Islam, SyedK ; Edwards, Laura M.
Author_Institution :
Dept. of Comput. & Electr. Eng., Tennessee Univ., Knoxville, TN
Abstract :
This paper describes the integration of vertically aligned carbon nanofibers (VACNF) with the CMOS integrated circuits fabricated with commercial CMOS processes. The growth temperature of VACNF is about 700degC (Merkulov et al., 2001) which is well above the maximum operating temperature of CMOS circuits. In order to integrate VACNF with CMOS circuits, a method is described to transfer the separately grown VACNF onto the CMOS circuit
Keywords :
CMOS integrated circuits; biosensors; carbon fibres; electrochemical sensors; CMOS integrated circuits; sensor; vertically aligned carbon nanofibers; Ambient intelligence; CMOS integrated circuits; CMOS process; Chemical and biological sensors; Low voltage; Nanobioscience; Nickel; Optical fiber sensors; Plasma temperature; Scanning electron microscopy;
Conference_Titel :
Electrical and Computer Engineering, 2006. ICECE '06. International Conference on
Conference_Location :
Dhaka
Print_ISBN :
98432-3814-1
DOI :
10.1109/ICECE.2006.355286
