• DocumentCode
    2490077
  • Title

    Integration of Vertically Aligned Carbon Nano Fibers with CMOS Integrated Circuits for Sensor Applications

  • Author

    Rahman, Touhidur ; Mcknight, Timothy E. ; Fletcher, Benjamin L. ; Melechko, Anatoli V. ; Simpson, Michael L. ; Islam, SyedK ; Edwards, Laura M.

  • Author_Institution
    Dept. of Comput. & Electr. Eng., Tennessee Univ., Knoxville, TN
  • fYear
    2006
  • fDate
    19-21 Dec. 2006
  • Firstpage
    45
  • Lastpage
    47
  • Abstract
    This paper describes the integration of vertically aligned carbon nanofibers (VACNF) with the CMOS integrated circuits fabricated with commercial CMOS processes. The growth temperature of VACNF is about 700degC (Merkulov et al., 2001) which is well above the maximum operating temperature of CMOS circuits. In order to integrate VACNF with CMOS circuits, a method is described to transfer the separately grown VACNF onto the CMOS circuit
  • Keywords
    CMOS integrated circuits; biosensors; carbon fibres; electrochemical sensors; CMOS integrated circuits; sensor; vertically aligned carbon nanofibers; Ambient intelligence; CMOS integrated circuits; CMOS process; Chemical and biological sensors; Low voltage; Nanobioscience; Nickel; Optical fiber sensors; Plasma temperature; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical and Computer Engineering, 2006. ICECE '06. International Conference on
  • Conference_Location
    Dhaka
  • Print_ISBN
    98432-3814-1
  • Type

    conf

  • DOI
    10.1109/ICECE.2006.355286
  • Filename
    4178404
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2490077