A 2Ã\x972 MEMS Optical Switch Based on Piezoelectric Actuation

Author

Barua, Bappi ; Nayim, Md Hasan ; Bhuiyan, Mahmud Abdul Matin

Author_Institution

Dept. of Electr. & Electron. Eng., Chittagong Univ. of Eng. & Technol.

fYear

2006

fDate

19-21 Dec. 2006

Firstpage

52

Lastpage

55

Abstract

A fully micromachined single mode 2times2 cross-bar optical switch based on noble piezoelectric actuation has been designed and simulated for small volume, low insertion loss and low switching voltage. Piezoelectric unimorph bender was used for actuating the micromirror of the switch. The performance of the switch was simulated in MATLAB. The required tip displacement of the micromirror had found 34.48mum at 50V. For 146.2mum input and output fiber end separation the insertion loss (IL) of the designed switch had found 0.7102dB, 1.6919dB and 2.219dB at 800nm, 1310nm and 1550nm wavelength respectively.

Keywords

low-power electronics; micro-optics; micromachining; microswitches; optical switches; piezoelectric actuators; 0.7102 dB; 1.6919 dB; 1310 nm; 146.2 micron; 1550 nm; 2.219 dB; 34.48 micron; 50 V; 800 nm; MATLAB; MEMS optical switch; insertion loss; micromachined cross-bar optical switch; piezoelectric actuation; piezoelectric unimorph bender; tip displacement; Design engineering; Insertion loss; Micromechanical devices; Mirrors; Nickel; Optical losses; Optical switches; Piezoelectric actuators; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2006. ICECE '06. International Conference on

Conference_Location

Dhaka

Print_ISBN

98432-3814-1

Type

conf

DOI

10.1109/ICECE.2006.355288

Filename

4178406