Title :
A Survey of Ion Beam Milling Techniques for Piezoelectric Device Fabrication
Author :
Castellano, R.N. ; Hokanson, J.L.
Keywords :
Chemicals; Etching; Fabrication; Frequency; Ion beams; Milling; Piezoelectric devices; Plasma applications; Plasma chemistry; Plasma materials processing;
Conference_Titel :
29th Annual Symposium on Frequency Control. 1975
DOI :
10.1109/FREQ.1975.200073
