Preliminary investigations into SU-8 as a material for integrated all-optical microwave filters

Author

Curtis, Philip D. ; Iezekiel, Stavros ; Miles, Robert E. ; Pescod, Christopher R.

Author_Institution

Inst. of Microwaves & Photon., Leeds Univ., UK

fYear

2000

fDate

2000

Firstpage

116

Lastpage

120

Abstract

The optical characteristics of the ultrathick negative photoresist SU-8 have been investigated for use in integrated all-optical microwave filters. SU-8 has excellent micromachining properties and optical waveguides can be produced using fast, low cost photolithographical techniques with processing temperatures of less than 100°C. This makes it a suitable material for rapid prototyping of integrated optical circuits. Multimode waveguides were fabricated and were found to have a loss of 6 dB/cm at 850 nm

Keywords

integrated optics; micromachining; microwave filters; microwave photonics; optical fabrication; optical losses; optical materials; optical waveguide filters; photoresists; 100 C; 850 nm; SU-8 material; fabrication; integrated all-optical microwave filter; integrated optical circuit; loss; micromachining; multimode waveguide; optical characteristics; optical waveguide; photolithography; rapid prototyping; ultrathick negative photoresist; Costs; Integrated optics; Micromachining; Microwave filters; Optical filters; Optical materials; Optical waveguides; Prototypes; Resists; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

High Frequency Postgraduate Student Colloquium, 2000

Conference_Location

Dublin

Print_ISBN

0-7803-6590-9

Type

conf

DOI

10.1109/HFPSC.2000.874093

Filename

874093