DocumentCode :
2492712
Title :
A new type of highly sensitive portable ozone sensor operating at room temperature
Author :
Wang, Ch.Y. ; Cimalla, V. ; Roehlig, C.-C. ; Stauden, Th. ; Niebelschuetz, F. ; Ambacher, O. ; Kiesewetter, O. ; Kittelmann, S.
Author_Institution :
Tech. Univ. Ilmenau, Ilmenau
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
81
Lastpage :
84
Abstract :
In2O3(001) thin films were grown on (0001) sapphire by metal-organic chemical vapor deposition. Highly textured ln2O3 films were tested as ozone sensors based on the photoreduction and oxidation effects. The sensors were found to have the largest sensitivity at room temperature. With such ln2O3 based sensors, the ozone concentrations in a wide range from 15 ppb up to 92 ppm were measured.
Keywords :
MOCVD coatings; air pollution measurement; gas sensors; indium compounds; nonelectric sensing devices; ozone; semiconductor thin films; highly sensitive portable ozone sensor; metal-organic chemical vapor deposition; oxidation effects; photoreduction effects; Atmospheric measurements; Chemical sensors; Chemical vapor deposition; Energy consumption; Light emitting diodes; Oxidation; Pollution measurement; Sputtering; Temperature sensors; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
ISSN :
1930-0395
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.355723
Filename :
4178561
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2492712
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