Title :
Proposal of a thermally-tunable silicon-on-insulator microring resonator filter
Author :
Dai, Daoxin ; Yang, Liu
Author_Institution :
Zhejiang Univ., Zhejiang
Abstract :
An ultrasmall microring resonator (MRR) based on silicon-on-insulator nanowires is presented. The metal circuit along the microring is used as a submicron heater. For the fabrication of the present thermally-tunable MRR, only a single lithography process is needed.
Keywords :
integrated optics; integrated optoelectronics; lithography; micro-optics; nanowires; optical fabrication; optical filters; optical resonators; optical tuning; silicon-on-insulator; Si; lithography process; metal circuit; silicon-on-insulator nanowires; submicron heater; thermally-tunable silicon-on-insulator microring resonator filter; ultrasmall microring resonator; Lithography; Nanowires; Optical device fabrication; Optical films; Optical filters; Optical resonators; Proposals; Resonator filters; Silicon on insulator technology; Tunable circuits and devices;
Conference_Titel :
Optical Fiber Communication and Optoelectronics Conference, 2007 Asia
Conference_Location :
Shanghai
Print_ISBN :
978-0-9789217-2-9
Electronic_ISBN :
978-0-9789217-2-9
DOI :
10.1109/AOE.2007.4410882
