DocumentCode
2493416
Title
Raman enhancement of TO-520cm−1 mode of Si by off-plane one- dimensional grating etched on Si substrate
Author
Ling-Chung Chou ; Kuan, C.-H.
Author_Institution
Nat. Taiwan Univ., Taipei
fYear
2007
fDate
17-19 Oct. 2007
Firstpage
620
Lastpage
622
Abstract
We have observed the relationship between the intensity of Raman scattering of TO-520 cm-1 mode of Si and variations of the geometrical structure of Si gratings as well as the polarizations of incident waves.
Keywords
Raman spectra; diffraction gratings; elemental semiconductors; etching; light polarisation; photonic crystals; silicon; Raman scattering; Si substrate; TO-520 cm-1 mode; geometrical structure; grating etching; incident wave polarization; Diffraction gratings; Etching; Geometrical optics; Optical detectors; Optical polarization; Optical scattering; Optical surface waves; Photonic crystals; Raman scattering; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication and Optoelectronics Conference, 2007 Asia
Conference_Location
Shanghai
Print_ISBN
978-0-9789217-3-6
Type
conf
DOI
10.1109/AOE.2007.4410897
Filename
4410897
Link To Document