• DocumentCode
    2493416
  • Title

    Raman enhancement of TO-520cm−1 mode of Si by off-plane one- dimensional grating etched on Si substrate

  • Author

    Ling-Chung Chou ; Kuan, C.-H.

  • Author_Institution
    Nat. Taiwan Univ., Taipei
  • fYear
    2007
  • fDate
    17-19 Oct. 2007
  • Firstpage
    620
  • Lastpage
    622
  • Abstract
    We have observed the relationship between the intensity of Raman scattering of TO-520 cm-1 mode of Si and variations of the geometrical structure of Si gratings as well as the polarizations of incident waves.
  • Keywords
    Raman spectra; diffraction gratings; elemental semiconductors; etching; light polarisation; photonic crystals; silicon; Raman scattering; Si substrate; TO-520 cm-1 mode; geometrical structure; grating etching; incident wave polarization; Diffraction gratings; Etching; Geometrical optics; Optical detectors; Optical polarization; Optical scattering; Optical surface waves; Photonic crystals; Raman scattering; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication and Optoelectronics Conference, 2007 Asia
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-0-9789217-3-6
  • Type

    conf

  • DOI
    10.1109/AOE.2007.4410897
  • Filename
    4410897