DocumentCode :
2493453
Title :
Nanostructured Molybdenum Oxide Gas Sensors
Author :
Li, Y.X. ; Yang, Q.B. ; Yu, X.F. ; Trinchi, A. ; Sadek, A.Z. ; Wlodarski, W. ; Kalantar-zadeh, K.
Author_Institution :
Chinese Acad. of Sci., Shanghai
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
232
Lastpage :
234
Abstract :
In this paper, we present a surface acoustic wave (SAW) gas sensor based on nano-structured molybdenum oxide (MoOx) thin film. The film was deposited onto a 36deg YX LiTaO3 SAW transducer, with an operating frequency of approximately 103 MHz, by thermal evaporation. The nanostructured MoOx film consists of connected nanorods with diameters of less than 100 nm. We compared devices with MoOx deposited by RF sputtering and thermal evaporation and found those with evaporated films have response that are an order of magnitude larger.
Keywords :
gas sensors; molybdenum compounds; nanostructured materials; sputtered coatings; surface acoustic wave sensors; LiTaO3; MoO3; RF sputtering; frequency 103 MHz; molybdenum oxide; nanostructured gas sensor; surface acoustic wave gas sensor; thermal evaporation; Crystallization; Electrodes; Furnaces; Gas detectors; Gold; Powders; Sensor arrays; Sputtering; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
ISSN :
1930-0395
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.355764
Filename :
4178602
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2493453
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