DocumentCode
2493611
Title
Design of a Thin Film Photodetector with Angular Sensitivity for Optical Micro-Encoder
Author
Choi, Bongseok ; Kanamori, Yoshiaki ; Hane, Kazuhiro
Author_Institution
Tohoku Univ., Sendai
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
279
Lastpage
282
Abstract
In this paper, we describe a directional thin film photodetector with the objective of optical micro-encoder application. A directional photodetector with a high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of subwavelength grating. The angular sensitivity of photodetector is designed to satisfy the condition that the diffracted light from the scale grating incidents at the angle of the resonance. A numerical calculation and actual device performance are presented.
Keywords
encoding; micro-optics; optical sensors; photodetectors; thin film devices; angular sensitivity; diffracted light; directional thin film photodetector; guided-mode resonance; high absorption efficiency; optical micro-encoder; subwavelength grating; Diffraction gratings; Optical design; Optical distortion; Optical films; Optical filters; Optical interferometry; Optical sensors; Photodetectors; Resonance; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355774
Filename
4178612
Link To Document