An Inline-Type Microwave Power Sensor Based on MEMS Technology

The theory, design, fabrication and measurements of a novel structure for measuring power of microwave signals are presented. The novelty of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the power sensor is fully compatible with the GaAs MMIC process. The design, fabrication and experiment results of this sensor are given. In order to reduce the reflection losses of the sensor, an improvement of the sensor with an inductively tuned structure is presented and simulated.