Chip-scale High-speed Fourier-transform Spectrometer Based on a Combination of a Michelson and a Fabry-Perot Interferometer

We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.