• DocumentCode
    2494428
  • Title

    Gas Sensing Response Improvement of Well-Aligned TiO2 Nanowires Array

  • Author

    Francioso, L. ; Taurino, A.M. ; Forleo, A. ; Siciliano, P. ; Epifani, M.

  • Author_Institution
    CNR, Lecce
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    464
  • Lastpage
    465
  • Abstract
    Fast and cheap nanofabrication process of titania (TiO2) nanowires array with lateral dimensions width ranging from 90 to 180 nm and 1.4 mm in length is presented. In spite of typical pattern transfer techniques for submicron fabrication, this work focused on a 365 nm UV photolithographic process to obtain long nanowires of sol-gel nanostructured titania onto silicon oxide mesa. TiO2 nanostrips-based array was electrically connected by sputtered platinum electrodes and tested towards different gases. A performance comparison within micromachined and solid thin film gas sensor was carried out.
  • Keywords
    gas sensors; nanotechnology; nanowires; photolithography; sol-gel processing; titanium compounds; UV photolithographic process; gas sensing response improvement; nanofabrication process; nanowire array; sol gel nanostructured titania; Electrodes; Fabrication; Gases; Nanofabrication; Nanowires; Platinum; Silicon; Solids; Sputtering; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2006. 5th IEEE Conference on
  • Conference_Location
    Daegu
  • ISSN
    1930-0395
  • Print_ISBN
    1-4244-0375-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2007.355506
  • Filename
    4178658
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2494428