DocumentCode
2494584
Title
Improved Long-Term Aging in Deeply Etched SAW Resonators
Author
Adams, Charles A. ; Kusters, John A.
fYear
1978
fDate
1978
Firstpage
74
Lastpage
76
Keywords
Aging; Aluminum; Cleaning; Etching; Ovens; Plasma applications; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Surface contamination;
fLanguage
English
Publisher
ieee
Conference_Titel
32nd Annual Symposium on Frequency Control. 1978
Type
conf
DOI
10.1109/FREQ.1978.200223
Filename
1537163
Link To Document