Title :
Modeling of GaN electron mobility
Author :
Abdel-motaleb, Ibrahim M. ; Korotkov, Roman Y.
Author_Institution :
Dept. of Electr. Eng., Northern Illinois Univ., DeKalb, IL, USA
Abstract :
An analytical model for temperature-dependent electron-mobility in GaN has been developed. Scattering mechanisms by ionized impurities, dislocations, acoustic phonons, and optical phonons where considered. Using this model, the behavior of the electron mobility as a function of the carrier concentration and temperature was accurately predicted. Samples grown using the metalorganic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE) were used to validate the model. The results show that this model can, accurately, predict the behavior of the mobility regardless of the method of growth used.
Keywords :
III-V semiconductors; MOCVD; electron mobility; gallium compounds; molecular beam epitaxial growth; GaN; acoustic phonons; carrier concentration; dislocations; electron mobility modeling; growth method; ionized impurities; metalorganic chemical vapor deposition; molecular beam epitaxy; optical phonons; scattering mechanisms; Acoustic scattering; Analytical models; Electron mobility; Gallium nitride; Impurities; Molecular beam epitaxial growth; Optical scattering; Phonons; Predictive models; Semiconductor process modeling;
Conference_Titel :
Electron Devices for Microwave and Optoelectronic Applications, 2003. EDMO 2003. The 11th IEEE International Symposium on
Print_ISBN :
0-7803-7904-7
DOI :
10.1109/EDMO.2003.1259962