Post-CMOS Compatible Microfabrication of a Multi-Analyte Bioelectrochemical Sensor Array Microsystem

A multi-analyte electrochemical sensor array platform has been developed for protein-based biosensors utilizing post-CMOS compatible fabrication procedures that enables formation of single-chip biosensor array microsystems. The process was developed on a glass substrate to emulate the surface of a CMOS chip. A three-electrode system, including an array of gold working electrodes (WE) and an on-chip Ag/AgCl reference electrode (RE), was formed to facilitate electrochemical analysis protein-based interfaces. SU-8 epoxy resin was subsequently applied and patterned as an insulation and planerization layer before application of microfluidic channels used to self-assemble novel bio-interfaces on individual working electrodes. The protein-based bio-interfaces provide selectivity, and the electrode floorplan maximizes sensitivity and minimizes solution resistance errors. The electrodes on the prototype platform can be easily scaled to form ~100 electrodes on the surface of a 10 mm² CMOS chip.