Microfabricated chemical sensors for safety and emission control applications

Author

Hunter, Gary W. ; Neudeck, Philip G. ; Chen, Liang-Yu ; Knight, Dak ; Liu, C.C. ; Wu, Q.H.

Author_Institution

NASA Lewis Res. Center, Cleveland, OH, USA

Volume

1

fYear

1998

fDate

31 Oct-7 Nov 1998

Abstract

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications

Keywords

aerospace instrumentation; chemical sensors; leak detection; micromachining; microsensors; CO; CO₂; H₂; MEMS-based technology; O₂; aerospace applications; emission control applications; fire safety applications; high temperature semiconductors; leak detection; microfabricated chemical sensors; micromachining; Carbon dioxide; Chemical sensors; Chemical technology; Fires; Leak detection; Micromachining; Monitoring; Safety; Silicon carbide; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Digital Avionics Systems Conference, 1998. Proceedings., 17th DASC. The AIAA/IEEE/SAE

Conference_Location

Bellevue, WA

Print_ISBN

0-7803-5086-3

Type

conf

DOI

10.1109/DASC.1998.741503

Filename

741503