Title :
Microfabricated chemical sensors for safety and emission control applications
Author :
Hunter, Gary W. ; Neudeck, Philip G. ; Chen, Liang-Yu ; Knight, Dak ; Liu, C.C. ; Wu, Q.H.
Author_Institution :
NASA Lewis Res. Center, Cleveland, OH, USA
fDate :
31 Oct-7 Nov 1998
Abstract :
Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications
Keywords :
aerospace instrumentation; chemical sensors; leak detection; micromachining; microsensors; CO; CO2; H2; MEMS-based technology; O2; aerospace applications; emission control applications; fire safety applications; high temperature semiconductors; leak detection; microfabricated chemical sensors; micromachining; Carbon dioxide; Chemical sensors; Chemical technology; Fires; Leak detection; Micromachining; Monitoring; Safety; Silicon carbide; Temperature sensors;
Conference_Titel :
Digital Avionics Systems Conference, 1998. Proceedings., 17th DASC. The AIAA/IEEE/SAE
Conference_Location :
Bellevue, WA
Print_ISBN :
0-7803-5086-3
DOI :
10.1109/DASC.1998.741503
