A ZnO Nanorod Based 64?? YX LiNbO3 Surface Acoustic Wave CO Sensor

Zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) gas sensor has been developed. ZnO nanorods were deposited onto a layered ZnO/64deg YX LiNbO₃ substrate using a liquid solution method. Micro-characterization results reveal that the diameter and area density of ZnO nanorods are around 100 nm and 107 cm^-2, respectively. The sensor was exposed to different concentrations of CO in synthetic air. The sensor response at operating temperatures between 200degC and 300degC was examined. The study showed that the sensor responded with highest frequency shift at 265degC. At this temperature, stable base-line and fast response and recovery were observed. The developed sensor is promising for industrial applications.