Extraction of Physically Based High-Level Models for Rapid Prototyping of MEMS Devices and Control Circuitry

We present a novel MATLAB toolbox that, starting from discretized FEM device models, allows for the automated generation of physically based high-level system models. Our methodology is based on the mixed-level approach presented previously, which has proven to be a powerful method to tackle couplings between the electrostatic, fluidic, and mechanical energy domain. The resulting reduced-order models are formulated as state space models amenable to direct use in standard design tools. Due to its nature, the impact of design variations and environmental effects on the system performance can be quickly evaluated, which considerably facilitates full system optimization. The simulation of a micromirror demonstrates the power of our method, in particular the predictiveness w.r.t. experiments.