DocumentCode :
2496456
Title :
Thin film bulk wave acoustic resonators (FBAR) based filters
Author :
Orlov, A.T.
Author_Institution :
Nat. State Univ. of Ukraine, Kiev, Ukraine
fYear :
2004
fDate :
13-17 Sept. 2004
Firstpage :
424
Lastpage :
425
Abstract :
The advantages, constructions, materials for production of FBAR are analyzed. Active schemes of filters based on FBAR are proposed, and the results of modeling of active piezoelectric filters are discussed.
Keywords :
bulk acoustic wave devices; crystal filters; thin film devices; FBAR; active piezoelectric filters; thin film bulk wave acoustic resonators; Acoustic waves; Active filters; Etching; Film bulk acoustic resonators; Frequency; Piezoelectric films; Resonator filters; Substrates; Surface acoustic waves; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN :
966-7968-69-3
Type :
conf
DOI :
10.1109/CRMICO.2004.183271
Filename :
1390253
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2496456
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