DocumentCode
2496456
Title
Thin film bulk wave acoustic resonators (FBAR) based filters
Author
Orlov, A.T.
Author_Institution
Nat. State Univ. of Ukraine, Kiev, Ukraine
fYear
2004
fDate
13-17 Sept. 2004
Firstpage
424
Lastpage
425
Abstract
The advantages, constructions, materials for production of FBAR are analyzed. Active schemes of filters based on FBAR are proposed, and the results of modeling of active piezoelectric filters are discussed.
Keywords
bulk acoustic wave devices; crystal filters; thin film devices; FBAR; active piezoelectric filters; thin film bulk wave acoustic resonators; Acoustic waves; Active filters; Etching; Film bulk acoustic resonators; Frequency; Piezoelectric films; Resonator filters; Substrates; Surface acoustic waves; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN
966-7968-69-3
Type
conf
DOI
10.1109/CRMICO.2004.183271
Filename
1390253
Link To Document