DocumentCode
2496954
Title
Impact of Casimir force on nano accelerometers modeling
Author
Andreucci, Philippe ; Duraffourg, Laurent ; Ollier, Eric ; Nguyen, Valerie ; Delay, Marie Thérèse ; Robert, Philippe
Author_Institution
CEA, Grenoble
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
1057
Lastpage
1060
Abstract
In this article we compute the Casimir force for silicon nanostructures considering conductivity of silicon and material thickness as both most important parameters for NEMS modeling. We quantify the strong impact of this force on the static and dynamic behavior of a nano accelerometer and compare results to classical computations.
Keywords
Casimir effect; accelerometers; microsensors; nanotechnology; silicon; Casimir force; NEMS modeling; Si; conductivity; dynamic behavior; material thickness; nano accelerometers modeling; silicon nanostructures; static behavior; Accelerometers; Casimir effect; Conducting materials; Conductivity; Nanoelectromechanical systems; Nanostructured materials; Nanostructures; Optical sensors; Silicon; Slabs;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355807
Filename
4178802
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