Title :
A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays
Author :
Sun, Chih-Mimg ; Wang, Chuan-Wei ; Liu, Dong Hang ; Lu, Michael S C ; Fang, Weileun ; Liang, Chao-Jui ; Hsieh, Hsieh-Shen ; Shing, Tai-Kang
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94 mV/g.
Keywords :
CMOS integrated circuits; accelerometers; arrays; capacitive sensors; microsensors; CMOS MEMS accelerometer; electrical routing; four sensing finger arrays; sensing capacitance; Accelerometers; CMOS process; Capacitance; Costs; Electrodes; Fingers; Micromechanical devices; Routing; Sensor arrays; Springs;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355822
