Title :
A membrane quadrant probe for R&D applications
Author :
Basu, S. ; Gleason, R.
Author_Institution :
Cascade Microtech Inc., Beaverton, OR, USA
Abstract :
Membrane probes are known for their applications to production probing and their ability to integrate RF lines, matching networks and good power supply bypassing for known good die testing on-wafer. Nonetheless, they require die-specific design and are not reconfigurable. In this paper, we discuss a quadrant probe based on membrane technology which offers this alternative with lower loss than membrane probes and better DC bypassing capability than any other quadrant probe.
Keywords :
MMIC; S-parameters; impedance matching; integrated circuit measurement; integrated circuit testing; probes; production testing; DC bypassing; R&D applications; RF lines; die-specific design; known good die testing; loss; matching networks; membrane quadrant probe; on-wafer testing; power supply bypassing; production probing; Biomembranes; Capacitors; Coaxial cables; Coaxial components; Coplanar waveguides; Impedance; Microstrip; Probes; Radio frequency; Research and development;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.596731
