DocumentCode
2497248
Title
Carbon-doped p-type In0.53Ga0.47As and its application to InP/In0.53Ga0.47As heterojunction bipolar transistors
Author
Tu, C.W.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of California at San Diego, La Jolla, CA, USA
fYear
1993
fDate
19-22 Apr 1993
Firstpage
695
Lastpage
698
Abstract
P-type carbon-doped In0.53Ga0.47As grown by various epitaxial techniques is reviewed. High hole concentrations in In 0.53Ga0.47As can be achieved by using CCl4 or CBr4 as the carbon doping source. The highest hole concentration so far is 9 × 1019 cm-3 by gas-source molecular beam epitaxy with CBr4. Results of InP/In0.53Ga0.47A single and double heterojunction bipolar transistors are summarized
Keywords
III-V semiconductors; carbon; carrier density; chemical beam epitaxial growth; gallium arsenide; heterojunction bipolar transistors; indium compounds; semiconductor doping; semiconductor growth; C doping sources; InP-InGaAs:C; InP/In0.53Ga0.47As heterojunction bipolar transistors; epitaxial techniques; gas-source molecular beam epitaxy; hole concentrations; p-type; Carbon dioxide; Doping; Epitaxial growth; Gallium arsenide; Heterojunction bipolar transistors; Indium phosphide; Lattices; Metallic superlattices; Molecular beam epitaxial growth; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on
Conference_Location
Paris
Print_ISBN
0-7803-0993-6
Type
conf
DOI
10.1109/ICIPRM.1993.380549
Filename
380549
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