DocumentCode
2497256
Title
A Pull-in Operation Mode Accelerometer
Author
Pakula, Lukasz ; French, Patrick
Author_Institution
Delft Univ. of Technol., Delft
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
1127
Lastpage
1130
Abstract
In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.
Keywords
accelerometers; micromachining; Al; differential capacitive sensing devices; digital circuit; digital signal; mechanical layer; phosphosilicate glass; pull-in operation mode accelerometer; surface micromachining; Acceleration; Accelerometers; Damping; Digital circuits; Electrodes; Equations; Micromachining; Pulse measurements; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2006. 5th IEEE Conference on
Conference_Location
Daegu
ISSN
1930-0395
Print_ISBN
1-4244-0375-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.355824
Filename
4178819
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