Title :
A palm-sized gas-chromatographic system for sub-ppb VOC detection in air quality monitoring applications
Author :
Zampolli, S. ; Elmi, I. ; Cardinali, G.C. ; Masini, L. ; Zani, A. ; Severi, M. ; Betti, P. ; Dalcanale, E.
Author_Institution :
Nat. Res. Council Bologna, Bologna
Abstract :
Micromachining technology for the miniaturization of gas-chromatographic (GC) components together with innovative pre-concentration materials are used for the development of a portable sub-ppb level monitoring system for aromatic volatile organic compounds (VOC). The high sensitivity of metal oxide semiconductor (MOX) gas sensors is combined with GC techniques to increase selectivity and reduce the detection limit. The systemic approach includes the study of innovative pre-concentration materials, micromachining of GC components and devices, the fabrication and characterization of complete system prototypes as well as the development of application-specific control electronics.
Keywords :
air pollution measurement; chromatography; gas sensors; monitoring; organic compounds; MOX gas sensor; air quality monitoring; aromatic volatile organic compounds; innovative pre-concentration materials; metal oxide semiconductor gas sensors; micromachining technology; miniaturization; palm-sized gas-chromatographic system; sub-ppb VOC detection; Chemical sensors; Chemical technology; Gas detectors; Micromachining; Monitoring; Sensor arrays; Sensor systems; Silicon; Sputtering; Thermal sensors;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355837