Title :
A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers
Author :
Mancarella, Fulvio ; Roncaglia, Alberto ; Tamarri, Fabrizio ; Elmi, Ivan ; Cardinali, Gian Carlo ; Severi, Maurizio
Author_Institution :
Nat. Res. Council of Italy, Bologna
Abstract :
We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
Keywords :
electric variables measurement; silicon; thermoelectric devices; transducers; Si; electrical measurements; electrical test; polysilicon-based thermoelectric transducers; test geometry; thermoelements; Aluminum; Biomembranes; Doping; Fabrication; Performance evaluation; Platinum; Thermal conductivity; Thermal sensors; Thermoelectricity; Transducers;
Conference_Titel :
Sensors, 2006. 5th IEEE Conference on
Conference_Location :
Daegu
Print_ISBN :
1-4244-0375-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.355851
