Wine-Glass Mode Micro-Mechanical Resonator

This paper reports on the fabrication and measurement of a wine-glass mode micro-mechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10 mum and 20 mum, respectively. Our resonator shows a resonant frequency of f₀=88.5 MHz, a motional resistance of R_x=8.3 MOmega and a quality factor of 5000 in air.