Title :
Switching time analysis for non-uniform serpentine flexure based RF-MEMS switches
Author :
Sharma, Arvind Kumar ; Gupta, Neeraj
Author_Institution :
Dept. of Electr. & Electron. Eng., Birla Inst. of Technol. & Sci., Pilani, India
Abstract :
In this paper we present, the switching time analysis for non-uniform serpentine flexure based capacitive radio frequency (RF) micromechanical systems (MEMS) switches. The general equations of spring constant and switching time are developed analytically for the proposed switch and further used to improve the switching time of serpentine flexure based RF MEMS switches. The calculated switching time for 640 μm long fixed-fixed beam is found to be 1-4 millisecond with varying span beam length of 100 to 280 μm.
Keywords :
microswitches; capacitive radio frequency micromechanical system switches; fixed-fixed beam; nonuniform serpentine flexure based RF MEMS switches; switching time analysis; varying span beam length; Connectors; Copper; Damping; Iron; Reactive power; Springs; Switches; RF MEMS; serpentine flexure; switching time;
Conference_Titel :
Engineering and Systems (SCES), 2013 Students Conference on
Conference_Location :
Allahabad
Print_ISBN :
978-1-4673-5628-2
DOI :
10.1109/SCES.2013.6547531
